The SurePower™ platform of RF Generators from MKS features the highest power available in a 3U height package (13 kW) at 13.56MHz. The SurePower platform's state-of-the-art RF topologies produce the highest reliability, reproducibility and accuracy of any generator in today's marketplace.

Offering the most advanced class of 13.56MHz generators commercially available, the SurePower platform's frequency insensitive control board filters out intermodulation products, providing NIST-traceable, industry-leading forward power accuracy of ± 1% of set point. Higher spectral purity provides a cleaner signal for better process control, while optional auto frequency tuning eliminates mechanical components and allows the use of fixed matching networks for faster tuning, greater overall system reliability and lower cost. This ensures tight process control and repeatability. A robust amplifier resists plasma transients and load phase or high VSWR conditions, while the embedded sensor technology enables high accuracy power measurements across a wide dynamic range.

The SurePower platform is suitable for all 13.56MHz applications for the manufacture of integrated circuits, flat panel displays and data storage devices, including PECVD, HDPCVD, PVD, ALD, etch, and strip. It assures repeatable results wafer to wafer and lot to lot, and it is available in power levels from 3.5kW to 13kW.