The MKS 627C/628C e-Baratron® Capacitance Manometers are specially designed for networking with Ethernet communications devices for real-time diagnostics. The new all-digital pressure manometers incorporate MKS' well-known Baratron capacitance technology to deliver highly accurate, reliable, stable pressure measurements to many critical manufacturing processes.

Now equipped with Ethernet communications, the new e-Baratron manometer enables diagnostics on a real-time basis during processing, allowing users to quickly and easily perform system analysis and troubleshooting, significantly improving system uptime and process repeatability.

The advanced manometer can be either digitally networked or used as a stand-alone vacuum monitor in virtually any process or application. An embedded Internet web browser provides communications with a Windows®-based PC. With a rapid datalogger (100 msec), the 627C/628C e-Baratron manometer performs quick, detailed self-diagnostics and simplifies the troubleshooting of other system components.

Models can be heated to either 45°C or 100°C for use in harsh semiconductor and display manufacturing, as well as biopharmaceutical processes. Accuracy is better than 0.10% of Reading, while full scale ranges from 1000 to 0.02 Torr give the e-Baratron manometer the widest application range of any capacitance manometer on the market. Its standard all-metal, all-welded pressure sensor has exceptional corrosion resistance from aggressive process gases. Additionally, the manometer incorporates an MKS patented particle sump to prevent process by-products from condensing on the diaphragm and causing drift.