Based on MTI's exclusive Push-Pull capacitance technology, the ProformaTM AutoScan 200 delivers full wafer surface scanning with throughputs of up to 100 wafers per hour. The Autoscan provides highly accurate, repeatable measurements of both semiconducting and semi-insulating wafers from 75 mm to 200 mm in diameter. User-defined and ASTM/SEMI scan patterns are used to generate full 3-dimensional wafer images. To improve system upgradability and ease of service, the AutoScan takes full advantage of its modular design. Optional equipment is quickly and easily installed, maximizing system uptime.
Versatile Standard Features
The AutoScan 200 comes standard with two cassette stands that can be defined as input or output stations. An additional cassette stand is also available for greater capacity or wafer sorting. The Class 10 compatible pick and place robotic handling system is equipped with laser cassette scanning for non-contact detection of empty slots, crossovers and broken wafers. The integrated wafer pre-aligner is capable of detecting all SEMI standard notches and flats. To maximize available space, the AutoScan 200 is designed to deliver maximum capability with a minimal footprint. The Windows® NT -based controller PC built into the system offers three levels of security, from a production environment to full engineering analysis of wafer geometry. An on-board RJ-45 connector enables easy data transfer to any network, while an integrated Iomega® zip drive adds data storage and backup capability.
Features
- Exclusive MTI Instruments capacitance sensors
- Measures all materials including Si, GaAs, Ge, InP, SiC
- 100 wafers/hour throughput
- Integrated control PC
- Modular design for future upgrades
- Enclosed environment for Class 10 compatibility
- SEMI S2-0200 health and safety compliant design
- SEMI S8-0999 ergonomic compliant design
- Integrated casters and leveling feet for portability
- Optional laser OCR mark reading and resistivity module
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