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MKS Instruments, Inc. Data Sheets for Gas Flow Meters

Address:

90 Industrial Way
Wilmington, MA 01887-4610

Contact:

Web site
E-mail

Phone:	(978) 284-4000
Fax:	(978) 284-4999

Gas Flow Meters:

Gas flow meters are used for measuring the flow or quantity of a moving gas in an enclosed pipe or passage.

Learn more about Gas Flow Meters.

Page: 1 2 3

Product Name	Notes
ALTA™ Mass Flow Controller -- 1480A-11C-*****	Improved accuracy to 1% of reading, recall 20 stored gas tables
ALTA™ Mass Flow Controller -- 1480A-12C-*****	Improved accuracy to 1% of reading, recall 20 stored gas tables
ALTA™ Mass Flow Controller -- 1480A-13C-*****	Improved accuracy to 1% of reading, recall 20 stored gas tables
ALTA™ Mass Flow Controller -- 1480A-14C-*****	Improved accuracy to 1% of reading, recall 20 stored gas tables
ALTA™ Mass Flow Controller -- 1480A-21C-*****	Improved accuracy to 1% of reading, recall 20 stored gas tables
ALTA™ Mass Flow Controller -- 1480A-22C-*****	Improved accuracy to 1% of reading, recall 20 stored gas tables
ALTA™ Mass Flow Controller -- 1480A-23C-*****	Improved accuracy to 1% of reading, recall 20 stored gas tables
ALTA™ Mass Flow Controller -- 1480A-24C-*****	Improved accuracy to 1% of reading, recall 20 stored gas tables
ALTA™ Mass Flow Controller -- 1480A-51C-*****	Improved accuracy to 1% of reading, recall 20 stored gas tables
ALTA™ Mass Flow Controller -- 1480A-52C-*****	Improved accuracy to 1% of reading, recall 20 stored gas tables
ALTA™ Mass Flow Controller -- 1480A-53C-*****	Improved accuracy to 1% of reading, recall 20 stored gas tables
ALTA™ Mass Flow Controller -- MC20A-12C-****	Improved accuracy to 1% of reading, recall 20 stored gas tables
ALTA™ Mass Flow Controller -- MC20A-22C-****	Improved accuracy to 1% of reading, recall 20 stored gas tables
ALTA™ Mass Flow Controller -- MC20A-51C-****	Improved accuracy to 1% of reading, recall 20 stored gas tables
ALTA™ Mass Flow Meter -- 180A-11C-*****	Improved accuracy to 1% of reading, recall 20 stored gas tables
ALTA™ Mass Flow Meter -- 180A-12C-*****	Improved accuracy to 1% of reading, recall 20 stored gas tables
ALTA™ Mass Flow Meter -- 180A-13C-*****	Improved accuracy to 1% of reading, recall 20 stored gas tables
ALTA™ Mass Flow Meter -- 180A-14C-*****	Improved accuracy to 1% of reading, recall 20 stored gas tables
ALTA™ Mass Flow Meter -- 180A-21C-*****	Improved accuracy to 1% of reading, recall 20 stored gas tables
ALTA™ Mass Flow Meter -- 180A-22C-*****	Improved accuracy to 1% of reading, recall 20 stored gas tables
ALTA™ Mass Flow Meter -- 180A-23C-*****	Improved accuracy to 1% of reading, recall 20 stored gas tables
ALTA™ Mass Flow Meter -- 180A-24C-*****	Improved accuracy to 1% of reading, recall 20 stored gas tables
ALTA™ Mass Flow Meter -- 180A-51C-*****	Improved accuracy to 1% of reading, recall 20 stored gas tables
ALTA™ Mass Flow Meter -- 180A-52C-*****	Improved accuracy to 1% of reading, recall 20 stored gas tables
ALTA™ Mass Flow Meter -- 180A-53C-*****	Improved accuracy to 1% of reading, recall 20 stored gas tables

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Company Description
MKS Instruments is a leading worldwide provider of instruments, components, subsystems and process control solutions that measure, control, power and monitor critical parameters of advanced manufacturing processes such as semiconductor device manufacturing; thin-film manufacturing for flat panel... (more)

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