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ALTA™ Mass Flow Meter -- 180A-51C-***** Gas Flow Meters Data Sheets MKS Instruments, Inc.

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ALTA™ Mass Flow Meter -- 180A-51C-*****

SPECIFICATIONS

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Meter Technology	Thermal
Pipe Diameter (inch)	0.25
Mounting	In-line
End Fittings	VCO® / VCR® (optional feature); 1/4" Swagelok, C-Seal, W-Seal
Process Media Type	Gas
Notes	Improved accuracy to 1% of reading, recall 20 stored gas tables

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