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MKS Instruments, Inc. Data Sheets for Gas Flow Meters

Address:

90 Industrial Way
Wilmington, MA 01887-4610

Contact:

Web site
E-mail

Phone:	(978) 284-4000
Fax:	(978) 284-4999

Gas Flow Meters:

Gas flow meters are used for measuring the flow or quantity of a moving gas in an enclosed pipe or passage.

Learn more about Gas Flow Meters.

Page: 1 2 3

Product Name	Notes
ALTA™ Mass Flow Meter -- 185A-11C-*****	Improved accuracy to 1% of reading, recall 20 stored gas tables
ALTA™ Mass Flow Meter -- 185A-12C-*****	Improved accuracy to 1% of reading, recall 20 stored gas tables
ALTA™ Mass Flow Meter -- 185A-13C-*****	Improved accuracy to 1% of reading, recall 20 stored gas tables
ALTA™ Mass Flow Meter -- 185A-14C-*****	Improved accuracy to 1% of reading, recall 20 stored gas tables
ALTA™ Mass Flow Meter -- 185A-21C-*****	Improved accuracy to 1% of reading, recall 20 stored gas tables
ALTA™ Mass Flow Meter -- 185A-22C-*****	Improved accuracy to 1% of reading, recall 20 stored gas tables
ALTA™ Mass Flow Meter -- 185A-23C-*****	Improved accuracy to 1% of reading, recall 20 stored gas tables
ALTA™ Mass Flow Meter -- 185A-24C-*****	Improved accuracy to 1% of reading, recall 20 stored gas tables
ALTA™ Mass Flow Meter -- 185A-51C-*****	Improved accuracy to 1% of reading, recall 20 stored gas tables
ALTA™ Mass Flow Meter -- 185A-52C-*****	Improved accuracy to 1% of reading, recall 20 stored gas tables
ALTA™ Mass Flow Meter -- 185A-53C-*****	Improved accuracy to 1% of reading, recall 20 stored gas tables
GBR3A 23C	Mass flow verifier, 2000 sccm flow range
GBR3A 52C	Mass flow verifier, 500 sccm flow range
GBR3A 53C	Mass flow verifier, 5000 sccm flow range
M10MB 11C- 3	Elastomer sealed, 316 stainless steel construction, three inch footprint
M10MB 12C- 3	Elastomer sealed, 316 stainless steel construction, three inch footprint
M10MB 13C- 3	Elastomer sealed, 316 stainless steel construction, three inch footprint
M10MB 14C- 3	Elastomer sealed, 316 stainless steel construction, three inch footprint
M10MB 21C- 3	Elastomer sealed, 316 stainless steel construction, three inch footprint
M10MB 22C- 3	Elastomer sealed, 316 stainless steel construction, three inch footprint
M10MB 23C- 3	Elastomer sealed, 316 stainless steel construction, three inch footprint
M10MB 24C- 3	Elastomer sealed, 316 stainless steel construction, three inch footprint
M10MB 34C- 3	Elastomer sealed, 316 stainless steel construction, three inch footprint
M10MB 51C- 3	Elastomer sealed, 316 stainless steel construction, three inch footprint
M10MB 52C- 3	Elastomer sealed, 316 stainless steel construction, three inch footprint

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Company Description
MKS Instruments is a leading worldwide provider of instruments, components, subsystems and process control solutions that measure, control, power and monitor critical parameters of advanced manufacturing processes such as semiconductor device manufacturing; thin-film manufacturing for flat panel... (more)

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