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Pure Gas Moisture Transmitter -- Pura

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In many high purity gas applications, such as found in the semiconductor industry, the lowest residual moisture content of a gas is critical to maintaining a high yield operation. Historically, trace moisture measurement has been problematic, demanding the use of complex moisture analyzers or expensive analytical techniques. Now Michell has a simple, economical and very effective solution for on-line measurement of dew-point temperatures down to -180°F (equivalent to less than 1 part per billion). The Pura transmitter incorporates Michell's experience and expertise in the production and calibration of impedance dew- point sensors. Incorporation of industry standard materials and manufacturing processes gives the first low cost transmitter suitable for large-scale integration into a semiconductor fabrication facility or any other high purity gas application.

Specifications

Physical Specifications
Variables Measured DewPoint
Form Factor Transmitter
Performance Specifications
Dew Point Range -180 to -40 F
Dew Point Accuracy 1.80 +/-F


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