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In many high purity gas applications, such as found in the semiconductor industry, the lowest residual moisture content of a gas is critical to maintaining a high yield operation. Historically, trace moisture measurement has been problematic, demanding the use of complex moisture analyzers or expensive analytical techniques. Now Michell has a simple, economical and very effective solution for on-line measurement of dew-point temperatures down to -180°F (equivalent to less than 1 part per billion). The Pura transmitter incorporates Michell's experience and expertise in the production and calibration of impedance dew- point sensors. Incorporation of industry standard materials and manufacturing processes gives the first low cost transmitter suitable for large-scale integration into a semiconductor fabrication facility or any other high purity gas application.
| Physical Specifications | |
| Variables Measured | DewPoint |
| Form Factor | Transmitter |
| Performance Specifications | |
| Dew Point Range | -180 to -40 F |
| Dew Point Accuracy | 1.80 +/-F |
| Operating Temp | |
| Outputs / Display | |
| Electrical Outputs | |
| Display | |
| Technology | |
| Application | |