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MEMS Pressure Instruments Datasheets


971 UniMag Cold Cathode Transducer -- 971
from MKS Instruments, Inc.

The 971 UniMag„¢ transducer offers a measurement range from 1x10-8 Torr to 5x10-3Torr and is based on cold cathode inverted magnetron sensor technology.The 971 is a cost effective solution for base pressure measurement andcontrol. In addition to its small size, broad range and lower cost,...[See More]

  • Device Category: Instrument or Meter 
  • Pressure Measurement: Gauge; Vacuum 
  • Sensor Technology: Utilizes MEMS; Cold Cathode Inverted 
  • Material: Gas 
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972 DualMag Transducer -- 970
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