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MKS Instruments, Inc. Data Sheets for Gas Instruments

MKS Instruments, Inc.
Address: 2 Tech Drive
Suite 201
Andover, MA 01810
 Contact: Web site
E-mail

Phone:  (978) 645-5500
Fax: (978) 557-5100

Gas Instruments:

Gas instruments detect, monitor or analyze gases present in an environment.

Gas Instruments: Learn more

Product Name
Notes
MultiGas™ 2030 FTIR Gas Analyzer -- MultiGas™ 2030, MultiGas™ 2030-HS FTIR Gas Analyzer -- MultiGas™ 2030-HS Applications: emissions, process, ambient air, purity, catalytic monitoring
2032 Purity FTIR Gas Analyzer -- MultiGas™ 2032 Purity Continuous monitoring of trace contaminants in high purity bulk gases
InDuct In-line Process Gas FTIR Analyzer -- InDuct Integrated for fault detection, monitoring, control, endpoint determination
Process Sense™ NDIR Analyzer -- Process Sense™ NDIR specifically designed for Remote Plasma Chamber Clean Endpoint Detection
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  • Company Description:
    MKS Instruments is a leading worldwide provider of instruments, components, subsystems and process control solutions that measure, control, power and monitor critical parameters of advanced manufacturing processes such as semiconductor device manufacturing; thin-film manufacturing for flat panel... (more)