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MultiGas Purity
MultiGas Purity Gas and Air Instruments Data Sheets MKS Instruments, Inc.
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MKS Instruments, Inc.
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MultiGas Purity
SPECIFICATIONS
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Instrument Type
Analyzer
Mounting Type
Fixed
Sensor Technology
Infrared; FTIR
Number of Gases Monitored
Multi
Measurement Type
Trace; Signature
Notes
Constructed for corrosive high purity gases, 316 SS welded sample lines
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