|
||
Kaman's SMT-9700 system uses proven inductive (eddy current) technology to provide extremely high-resolution noncontact position/displacement feedback of virtually any electrically conductive target. It is ideal for applications requiring high-resolution position feedback for control and has been proven in applications including optics positioning in photolithography equipment, XYZ stage positioning in atomic force microscopy, and spindle position in precision grinding of bearing races.
| Operating Specifications | |
| Linear Range | 0.00 to 0.02 inch |
| Sensing Frequency | 10.00 kHz |
| Maximum Range | 0.02 inch |
| Nonlinearity | 1.0 ±% Full Scale |
| Temperature Stability | |
| Operating Parameters | |
| Device Type | |
| Target Material | |
| Output | |
| Physical Characteristics | |
| Housing | |
| Features | |
| Operating Temperature | |